NANOanalyse for micROmanipuLate

SP2-Sensing: Development of sensing tools

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3.2 - Passibve levitation sensor [3] [4]

This sensor operates on the principle of passive levitation. The sensitive body consists of a glass capillary maintained in levitation passively through a set of permanent magnets and diamagnetic graphite (fig.2). The stiffness is provided by the magnetic forces. It is as if the capillary, which is considered rigid, is connected to a magnetic spring acting in the horizontal direction. The measurement is performed in this direction for one component of the effort.

Fig.2 - 1 glass capillary, 2 permanent magnets, 3 diamagnetic graphite plate,
4 laser sensor, 5 positioning device..

Features:

Known limitations:

The development and refinement of this sensor are funded by ANR Psirob Stilmicroforce.

3.3 - Femto tools sensor

This is a silicon sensor micro-machined by the society Femto Tools. The displacements of the sensitive body are measured with a capacitive sensor integrated into the structure (fig.3).

Fig.3 - Femto tools sensor.

Features:

Known limitations:

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