NANOanalyse for micROmanipuLate
SP2-Sensing: Development of sensing tools
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3.2 - Passibve levitation sensor [3] [4]
This sensor operates on the principle of passive levitation. The sensitive body consists of a glass
capillary maintained in levitation passively through a set of permanent magnets and diamagnetic graphite
(fig.2). The stiffness is provided by the magnetic forces. It is as if the capillary,
which is considered rigid, is connected to a magnetic spring acting in the horizontal direction. The measurement
is performed in this direction for one component of the effort.
Fig.2 - 1 glass capillary, 2 permanent magnets, 3 diamagnetic graphite plate,
4 laser sensor, 5 positioning device..
Features:
Known limitations:
The development and refinement of this sensor are funded by ANR Psirob Stilmicroforce.
3.3 - Femto tools sensor
This is a silicon sensor micro-machined by the society Femto Tools. The displacements of the sensitive
body are measured with a capacitive sensor integrated into the structure (fig.3).
Fig.3 - Femto tools sensor.
Features:
Known limitations:
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